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29:43
YouTube
DTU Nanolab
Dry Etch TPT Lecture - 3 Etch Mechanisms
This video explains the etch mechanisms in plasma etching/reactive ion etching. First the chemical etch mechanism is explained and how to select the process gas(es). Then the physical and reactive ion mechanisms are explained and the role of the ions in these mechanisms. At last an introduction to the passivation mechanisms is given.
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Jun 26, 2024
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